您所在的位置:首页 > 市场解决方案 > 半导体设备
半导体设备

Semiconductor Equipment Motion Solutions

300 mm Wafer Handler Torque Motors

Robotic wafer handling has become a necessity in the closed environments used in advanced semiconductor wafer fabrication. Robotic handlers transfer and load/unload wafers within a cluster of processing tools.

Allied Motion supplies our Megaflux brushless torque motors in both housed and frameless versions that are integrated into semiconductor processing tools to smoothly and precisely power the handlers.

› View APPLICATION catalog


Wafer Dicing System Motors & Drives

Accurately and precisely dicing semi wafers into discrete die requires high response servo motors for the X, Y and Z axes and a high speed brushless spindle motor for the diamond saw.

Allied Motion's Quantum series BLDC servo motors, X series digital drives, and frameless Megaflux torque motors provide an optimum motion package for advanced wafer dicing.

› View APPLICATION catalog


版权所有 艾莱德摩新(常州)电机有限公司 地址:江苏省常州市新北区河海西路538号国展机电园19栋 总机: +86 519 85113625
技术支持:壹网科技