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Semiconductor Equipment Motion Solutions
| 300 mm Wafer Handler Torque Motors Robotic wafer handling has become a necessity in the closed environments used in advanced semiconductor wafer fabrication. Robotic handlers transfer and load/unload wafers within a cluster of processing tools. Allied Motion supplies our Megaflux brushless torque motors in both housed and frameless versions that are integrated into semiconductor processing tools to smoothly and precisely power the handlers. › View APPLICATION catalog |
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| Wafer Dicing System Motors & Drives Accurately and precisely dicing semi wafers into discrete die requires high response servo motors for the X, Y and Z axes and a high speed brushless spindle motor for the diamond saw. Allied Motion's Quantum series BLDC servo motors, X series digital drives, and frameless Megaflux torque motors provide an optimum motion package for advanced wafer dicing. › View APPLICATION catalog |
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